BOOK-CHAPTER

Preparation of Silica Membranes by Atomic Layer Deposition

Keywords:
Atomic layer deposition Microporous material Membrane Deposition (geology) Chemical engineering Surface modification Materials science Nanotechnology Layer (electronics) Chemistry Engineering Geology

Metrics

3
Cited By
1.59
FWCI (Field Weighted Citation Impact)
30
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Catalytic Processes in Materials Science
Physical Sciences →  Materials Science →  Materials Chemistry
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry

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