Preparation of Silica Membranes by Atomic Layer Deposition

Dimitrios Koutsonikolas; S.P. Kaldis; Grigoris T. Pantoleontos

doi:10.1016/b978-0-444-63866-3.00003-0

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Preparation of Silica Membranes by Atomic Layer Deposition

Dimitrios Koutsonikolas S.P. Kaldis Grigoris T. Pantoleontos

Year: 2017 Elsevier eBooks Pages: 45-62 Publisher: Elsevier BV

DOI: 10.1016/b978-0-444-63866-3.00003-0

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Keywords:

Atomic layer deposition Microporous material Membrane Deposition (geology) Chemical engineering Surface modification Materials science Nanotechnology Layer (electronics) Chemistry Engineering Geology

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Catalytic Processes in Materials Science

Physical Sciences → Materials Science → Materials Chemistry

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Preparation of Silica Membranes by Atomic Layer Deposition

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