Mousa LahdoTom StröhlaSergej Kovalev
Precision positioning in multiple degrees-of-freedom (DoF) is usually required in many industrial applications such as microscopy, inspection systems, semiconductor lithography and pick-and place machines [1].
Jeroen de BoeijE.A. LomonovaA.J.A. Vandenput
Jeroen de BoeijE.A. LomonovaA.J.A. Vandenput