A low temperature Ohmic contact for highly doped pGaN has been demonstrated with Mg electrodes. A Φ Bp of 0.47 eV with ρ c of 3.4×10 -2 Ωcm 2 has been extracted by electrical measurements with the TFE model. Considering the WF of the electrodes, the presence of a large potential shift near the interface to reduce the Φ Bp can be suggested. The results give lots of insights on the Ohmic contact for pGaN.
Doo‐Hyeb YounMaosheng HaoHisao SatôTomoya SugaharaYoshiki NaoiShiro Sakai
Kei TakeyamaRai MoriyaKenji WatanabeSatoru MasubuchiTakashi TaniguchiTomoki Machida
M. O. AboelfotohM. A. BorekJ. Narayan