JOURNAL ARTICLE
Micro-technique in Micro-miniaturized Parts Fabrication
Year: 1967 Journal: Nihon Kikai Gakkaishi/Journal of the Japan Society of Mechanical Engineers Vol: 70 (582)Pages: 1000-1012 Publisher: Japan Society Mechanical Engineers
Keywords:
Fabrication Materials science Nanotechnology Optoelectronics Medicine
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Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced machining processes and optimization
Physical Sciences → Engineering → Mechanical Engineering
Advanced Measurement and Metrology Techniques
Physical Sciences → Engineering → Mechanical Engineering
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