A MEMS-based Capacitive Flexible Film Force Sensor with Polymer Insulating Flat Dielectric

Gao-Feng Zhou; Lu-Jun Cui; Zexiang Zhao; Zheng‐Feng Li; Shirui Guo; Huichao Shang

doi:10.1142/9789813226517_0035

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A MEMS-based Capacitive Flexible Film Force Sensor with Polymer Insulating Flat Dielectric

Gao-Feng Zhou Lu-Jun Cui Zexiang Zhao Zheng‐Feng Li Shirui Guo Huichao Shang

Year: 2017 Pages: 241-250

DOI: 10.1142/9789813226517_0035

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Keywords:

Capacitive sensing Microelectromechanical systems Dielectric Materials science Optoelectronics Polymer Electrical engineering Capacitance Engineering physics Electrode Composite material Engineering Physics

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

A MEMS-based Capacitive Flexible Film Force Sensor with Polymer Insulating Flat Dielectric

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