OS1812 Highly-Sensitive Strain Sensor Using Carbon Nanotubes

Abstract

A new highly sensitive strain measurement method has been developed by applying the change of electronic conductivity of CNTs. In order to control the shape of MWCNTs, MWCNT is developed by applying a chemical vapor deposition (CVD) method. It is found that the shape of MWCNTs can be controlled by changing the thickness of catalyst particles and deposition temperature. The quality of the grown CNTs was measured by Raman spectroscopy. Electrical resistance of the vertically aligned CNTs was also measured by four-point proving method. The obtained gauge factor was 100. This result clearly indicated the possibility of a highly sensitive strain sensor using CNTs.