Research of ultra micro hole with high aspect ratio by MEDM

Abstract

In order to meet the demands of high integration in electronic and optical applications, mechanical micro-machining technology ^<(1), (2)> has been progressing rapidly in recent years for its 3D accessibility to a variety of materials. Newly developed in this research is a multifunctional machining system capable of micro- milling, turning, grinding, buffing, polishing, EDM, ECM, laser machining and their combinations. Features that were considered at process were hole, slots, free form surface, cylindrical feature and surface. We focus on the deep hole in micro region. This paper reports micro deep holes fabrication by micro EDM and its evaluation.