OPTOMECHANICAL TRANSDUCER-BASED SOFT AND HIGH FREQUENCY NANOSCALE CANTILEVER FOR ATOMIC FORCE MICROSCOPY

Sang M. An; Jie Zou; Glenn Holland; Jungseok Chae; Andrea Centrone; Vladimir Aksyuk

doi:10.31438/trf.hh2016.71

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OPTOMECHANICAL TRANSDUCER-BASED SOFT AND HIGH FREQUENCY NANOSCALE CANTILEVER FOR ATOMIC FORCE MICROSCOPY

Sang M. An Jie Zou Glenn Holland Jungseok Chae Andrea Centrone Vladimir Aksyuk

Year: 2016 Journal: 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest Pages: 266-269

DOI: 10.31438/trf.hh2016.71

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Keywords:

Cantilever Atomic force microscopy Nanoscopic scale Transducer Non-contact atomic force microscopy Force transducer Atomic force acoustic microscopy Materials science Nanomechanics Nanotechnology Microscopy Soft materials Physics Acoustics Optoelectronics Optics Magnetic force microscope Kelvin probe force microscope Composite material

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Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

OPTOMECHANICAL TRANSDUCER-BASED SOFT AND HIGH FREQUENCY NANOSCALE CANTILEVER FOR ATOMIC FORCE MICROSCOPY

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