Low Frequency Electrical Conduction in Thin Polyimide Films Prepared by Vapor Deposition Polymerization

Abstract

Several types of thin polyimide (PI) films are prepared by vapor deposition polymerization, and the electrical conduction has been investigated with low frequency voltage. The samples coated with plasma polymerized ethylene (PPE) or subjected to plasma are used to study the role of the polyimide-electrode interface in electrical conduction. Leakage current is reduced extremely by surface treatment, and the correlation between leakage current and surface topograph on PI has been investigated using AFM technique. Effect of PPE coating and the influence of roughness of the PI surface on the electrical conduction are discussed.