JOURNAL ARTICLE

Erbium Incorporation in Yttrium Oxide Thin Films by Radical-enhanced Atomic Layer Deposition

Trinh VanRoman OstroumovJohn BargarKai WangJane P. Chang

Year: 2006 Journal:   ECS Meeting Abstracts Vol: MA2005-02 (12)Pages: 454-454   Publisher: Institute of Physics

Abstract

Abstract not Available.

Keywords:
Yttrium Atomic layer deposition Erbium Layer (electronics) Materials science Oxide Thin film Deposition (geology) Chemical engineering Optoelectronics Nanotechnology Metallurgy Doping Geology

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