JOURNAL ARTICLE
Erbium Incorporation in Yttrium Oxide Thin Films by Radical-enhanced Atomic Layer Deposition
Trinh VanRoman OstroumovJohn BargarKai WangJane P. Chang
Year: 2006 Journal: ECS Meeting Abstracts Vol: MA2005-02 (12)Pages: 454-454 Publisher: Institute of Physics
Abstract
Abstract not Available.
Keywords:
Yttrium Atomic layer deposition Erbium Layer (electronics) Materials science Oxide Thin film Deposition (geology) Chemical engineering Optoelectronics Nanotechnology Metallurgy Doping Geology
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Catalytic Processes in Materials Science
Physical Sciences → Materials Science → Materials Chemistry
Advanced Materials Characterization Techniques
Physical Sciences → Engineering → Biomedical Engineering
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