Structural, electrical and optical properties of multilayer TiO2 thin films deposited by sol–gel spin coating

Abstract

Titanium dioxide (TiO2) multilayer thin films having 1, 2, 3 and 4 layers have been deposited on glass substrate by using “sol–gel spin coating” technique. TiO2 has anatase crystal structure and the grain size is increased when the coating layers have been increased, according to XRD results. Four point probe measures the electrical properties showed that the average resistivity is decreased with increasing the stacked layers. “Optical properties” of the films were measured by “UV–Vis spectroscopy” which showed the high transmittance in the visible region. The “optical band gap energies” of 1, 2, 3 and 4 layers of TiO2 films were 3.65, 3.60, 3.59 and 3.40 eV, respectively. These properties showed that the multilayer films of TiO2 can be enhanced the properties of optoelectronic devices. Keywords: Multilayer films, TiO2, XRD, Optoelectronics