JOURNAL ARTICLE

Nanocrystalline MoOx Embedded ZrHfO High-k Memories

Xi LiuChia-Han YangYue KuoTao Yuan

Year: 2012 Journal:   ECS Meeting Abstracts Vol: MA2012-01 (20)Pages: 881-881   Publisher: Institute of Physics

Abstract

Abstract not Available.

Keywords:
Nanocrystalline material Materials science Nanotechnology

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Topics

Advanced Memory and Neural Computing
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences →  Materials Science →  Polymers and Plastics

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