JOURNAL ARTICLE
Nanocrystalline MoOx Embedded ZrHfO High-k Memories
Xi LiuChia-Han YangYue KuoTao Yuan
Year: 2012 Journal: ECS Meeting Abstracts Vol: MA2012-01 (20)Pages: 881-881 Publisher: Institute of Physics
Abstract
Abstract not Available.
Keywords:
Nanocrystalline material Materials science Nanotechnology
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Topics
Advanced Memory and Neural Computing
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences → Materials Science → Polymers and Plastics
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