Novel microstructured adaptive X-ray optics

Abstract

\nAdvances in the techniques of micro- and nano-fabrication mean that it is now possible to design and\nmake microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and\nlayout, these offer much better performances than current grazing incidence optics, which are limited to circular,\nsquare or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal\nlength – they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography\nand confocal x-ray microscopy.\n