Metal-assisted photochemical etching of gallium nitride using electrodeposited noble metal nanoparticles as catalysts

Miaorong Zhang; Fengxia Wang; Ge‐Bo Pan

doi:10.1016/j.elecom.2017.01.021

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Metal-assisted photochemical etching of gallium nitride using electrodeposited noble metal nanoparticles as catalysts

Miaorong Zhang Fengxia Wang Ge‐Bo Pan

Year: 2017 Journal: Electrochemistry Communications Vol: 76 Pages: 59-62 Publisher: Elsevier BV

DOI: 10.1016/j.elecom.2017.01.021

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Keywords:

Materials science Noble metal Etching (microfabrication) Nanoparticle Gallium Colloidal gold Nanotechnology Gallium nitride Catalysis Substrate (aquarium) Chemical engineering Metal Chemistry Metallurgy Layer (electronics)

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GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal-assisted photochemical etching of gallium nitride using electrodeposited noble metal nanoparticles as catalysts

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