Atomic Layer Deposition of Thin Films for Lithium-Ion Batteries

Titta Aaltonen; Mari Alnes; Ola Nilsen; Helmer Fjellvåg

doi:10.1149/ma2010-03/1/751

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Atomic Layer Deposition of Thin Films for Lithium-Ion Batteries

Titta Aaltonen Mari Alnes Ola Nilsen Helmer Fjellvåg

Year: 2010 Journal: ECS Meeting Abstracts Vol: MA2010-03 (1)Pages: 751-751 Publisher: Institute of Physics

DOI: 10.1149/ma2010-03/1/751

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Abstract

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Keywords:

Atomic layer deposition Lithium (medication) Layer (electronics) Materials science Deposition (geology) Ion Thin film Thin layer Chemical engineering Nanotechnology Chemistry Geology Engineering Psychology

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electron and X-Ray Spectroscopy Techniques

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Advancements in Battery Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Atomic Layer Deposition of Thin Films for Lithium-Ion Batteries

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