JOURNAL ARTICLE
A high-force and high isolation metal-contact RF MEMS switch
Peigang DengNing WangFeng CaiLongquan Chen
Year: 2017 Journal: Microsystem Technologies Vol: 23 (10)Pages: 4699-4708 Publisher: Springer Science+Business Media
Keywords:
Cantilever Materials science Microelectromechanical systems Electroplating Insertion loss Optoelectronics Voltage Return loss Beam (structure) Electrical engineering Optics Composite material Physics Engineering
Metrics
8
Cited By
0.92
FWCI (Field Weighted Citation Impact)
25
Refs
0.77
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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