Robust and Inexpensive Six-Axis Force–Torque Sensors Using MEMS Barometers

Abstract

Current commercial force-torque sensors are sensitive and accurate, but are also typically expensive and fragile. These features limit their use in cost-sensitive applications and unstructured environments such as people's homes. This paper presents a new design for an inexpensive and robust force-torque sensor that uses microelectromechanical system barometer transducers. The new design results in a six-axis force-torque sensor with an R2 greater than 0.90 for Fx and Fy, and an R2 greater than 0.98 for Fz, Mx, My, and Mz during compound loading. Furthermore, this sensor can be assembled in two days with off-the-shelf components for less than 20 USD.