Deposition barium titanate (BaTiO₃) doped lanthanum with chemical solution deposition

Abstract

Deposition of Barium Titanate (BaTiO3) thin films used Chemical Solution Deposition (CSD) method and prepared with spin coater. BaTiO3 is doped with lanthanum, 1%, 2%, and 3%. The thermal process use annealing temperature 900°C and holding time for 3 hours. The result of characterization with x-ray diffraction (XRD) equipment show that the addition of La3+ doped on Barium Titanate caused the change of angle diffraction.The result of refine with GSAS software shows that lanthanum have been included in the structure of BaTiO3. Increasing mol dopant La3+ cause lattice parameter and crystal volume become smaller. Characterization result using Scanning Electron Microscopy (SEM) equipment show that grain size (grain size) become smaller with increasing mole dopant (x) La3+. The result of characterization using Sawyer Tower methods show that all the samples (Barium Titanante and Barium Titanate doped lanthanum) are ferroelectric material. Increasing of mole dopant La3+ cause smaller coercive field and remanent polarization increases.