Fabrication of 3.1kV/10A 4H-SiC Junction Barrier Schottky Diodes

Abstract

A 4H-SiC Junction Barrier Schottky Diodes(JBSs) based on 30μm, 3×10 ¹⁵ cm ^-3 epitaxial structures was fabricated by using metal Ti as the Schottky metal. The Non-linearly limit field rings (NL-FLRs) is used as termination for protecting the anode edge. The fabricated device shows a breakdown voltage of 3.1kV at reverse leakage current of 200uA and the forward current of 11A at the voltage drop of 3 V, corresponding to a current density of 275A/cm ² , of which the on-resistance is 7.3 mΩ·cm ² . Finally, the 5266 MW/cm ² BFOM value of fabricated SiC JBSs is achieved. The results show our fabricated SiC JBSs has an excellent performance.