A Study on Fabrication of Multigate/Multichannel Polysilicon TFT

Jaehong Park; Chul-Ju Kim

doi:10.7567/ssdm.1996.d-3-5

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A Study on Fabrication of Multigate/Multichannel Polysilicon TFT

Jaehong Park Chul-Ju Kim

Year: 1996

DOI: 10.7567/ssdm.1996.d-3-5

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Keywords:

Materials science Fabrication Thin-film transistor Optoelectronics Polysilicon depletion effect Engineering physics Nanotechnology Electrical engineering Transistor Engineering Gate oxide

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Systems and Laser Technology

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

A Study on Fabrication of Multigate/Multichannel Polysilicon TFT

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