In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the aluminum-induced crystallization

M. Jung; Atsushi Okada; Toshio Saito; Takashi Suemasu; N. Usami

doi:10.7567/ssdm.2010.i-8-5

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In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the aluminum-induced crystallization

M. Jung Atsushi Okada Toshio Saito Takashi Suemasu N. Usami

Year: 2010

DOI: 10.7567/ssdm.2010.i-8-5

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Abstract

2010 International Conference on Solid State Devices and Materials,In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the aluminum-induced crystallization

Keywords:

Materials science Crystallization Crystallite Substrate (aquarium) Doping In situ Aluminium Thin film Chemical engineering Optoelectronics Nanotechnology Metallurgy

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the aluminum-induced crystallization

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