Parylene thin films dielectrics

Abstract

This paper will review current methods employed for vacuum deposition of polymeric thin films. parylene, the generic name for vacuum deposited poly-p-xylylene, will be emphasized. Vacuum deposition techniques have received attention because of their unique ability to form very thin insulating coatings for a variety of applications. Such films serve as dielectric coatings for circuit boards, capacitors, thermistors, and other electrical and electronic assemblies, including hybrid microelectronics. Outstanding dielectric properties coupled with true conformality and uniformity of coverage make Parylene an attractive choice for these and other end uses.