THE PROGRESS OF ArF EXCIMER LASER PHOTORESIST

JOURNAL ARTICLE

Year: 2003 Journal: Imaging Science and Photochemistry Vol: 21 (1) Publisher: Science Press

Keywords:

Photoresist Excimer laser Excimer Laser Optoelectronics Materials science Chemistry Optics Nanotechnology Physics

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.33

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials