JOURNAL ARTICLE
Polymer Thin Films Prepared by Vapor Deposition.
Year: 1992 Journal: NIPPON GOMU KYOKAISHI Vol: 65 (7)Pages: 408-416 Publisher: The Society of Rubber Industry
Keywords:
Polymer Materials science Thin film Deposition (geology) Chemical engineering Nanotechnology Composite material Engineering Geology
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Topics
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
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