JOURNAL ARTICLE

Photoinduced Selective Deposition of Aluminium Thin Film Using Dimethylaluminum Hydride

Keywords:
Materials science Silicon Substrate (aquarium) X-ray photoelectron spectroscopy Aluminium Hydride Thin film Deposition (geology) Inorganic chemistry Chemical engineering Photochemistry Metal Nanotechnology Optoelectronics Metallurgy Chemistry

Metrics

5
Cited By
0.51
FWCI (Field Weighted Citation Impact)
4
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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