MICROMACHINED DIFFERENTIAL TEMPERATURE GAS FLOW SENSOR WITH ON-CHIP READOUT ELECTRONICS

Paolo Bruschi; D. Navarrini; Massimo Piotto

doi:10.1142/9789812701770_0059

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MICROMACHINED DIFFERENTIAL TEMPERATURE GAS FLOW SENSOR WITH ON-CHIP READOUT ELECTRONICS

Paolo Bruschi D. Navarrini Massimo Piotto

Year: 2005 Journal: Sensors and Microsystems Pages: 345-350

DOI: 10.1142/9789812701770_0059

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Keywords:

Chip Electronics Surface micromachining Differential (mechanical device) Flow sensor Materials science Flow (mathematics) Electrical engineering Temperature measurement Optoelectronics Computer science Electronic engineering Engineering Physics Aerospace engineering Fabrication Acoustics Mechanics

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

MICROMACHINED DIFFERENTIAL TEMPERATURE GAS FLOW SENSOR WITH ON-CHIP READOUT ELECTRONICS

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