JOURNAL ARTICLE

MICROMACHINED DIFFERENTIAL TEMPERATURE GAS FLOW SENSOR WITH ON-CHIP READOUT ELECTRONICS

Keywords:
Chip Electronics Surface micromachining Differential (mechanical device) Flow sensor Materials science Flow (mathematics) Electrical engineering Temperature measurement Optoelectronics Computer science Electronic engineering Engineering Physics Aerospace engineering Fabrication Acoustics Mechanics

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Topics

Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor Technologies Research
Physical Sciences →  Engineering →  Biomedical Engineering
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