JOURNAL ARTICLE
Organometallic Chemical Vapor Deposition of Strontium Titanate thin Films
W. A. FeilBruce W. WesselsLauren M. TongeTobin J. Marks
Year: 1989 Journal: MRS Proceedings Vol: 168 Publisher: Cambridge University Press
Keywords:
Materials science Chemical vapor deposition Strontium titanate Thin film Combustion chemical vapor deposition Silicon Amorphous solid Hybrid physical-chemical vapor deposition Oxygen Crystallite Carbon film Chemical engineering Analytical Chemistry (journal) Inorganic chemistry Nanotechnology Metallurgy Crystallography Organic chemistry Chemistry
Metrics
4
Cited By
0.42
FWCI (Field Weighted Citation Impact)
2
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Electronic and Structural Properties of Oxides
Physical Sciences → Materials Science → Materials Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
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