Eigenschaften kapazitiver Dünnschicht / Feuchtesensoren Properties of capacitive thin-film humidity sensors

JOURNAL ARTICLE

Year: 1993 Journal: tm - Technisches Messen Vol: 60 (4)Pages: 134-140 Publisher: R. Oldenbourg Verlag

DOI: 10.1524/teme.1993.60.4.134

Keywords:

Capacitive sensing Humidity Materials science Composite material Electrical engineering Engineering Meteorology Physics

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