Depth-profiling Pore Morphology in Nanoporous Thin Films Using Positronium Lifetime Annihilation Spectroscopy

Richard S. Vallery; Hua-Gen Peng; W. E. Frieze; David W. Gidley; Darren L. Moore; Richard J. Carter

doi:10.1557/proc-863-b1.6

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Depth-profiling Pore Morphology in Nanoporous Thin Films Using Positronium Lifetime Annihilation Spectroscopy

Richard S. Vallery Hua-Gen Peng W. E. Frieze David W. Gidley Darren L. Moore Richard J. Carter

Year: 2005 Journal: MRS Proceedings Vol: 863 Publisher: Cambridge University Press

DOI: 10.1557/proc-863-b1.6

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Keywords:

Positronium Materials science Nanoporous Positron Amorphous solid Thin film Spectroscopy Positron annihilation spectroscopy Porosity Positron Lifetime Spectroscopy Positron annihilation Optoelectronics Nanotechnology Composite material Nuclear physics Crystallography

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Muon and positron interactions and applications

Physical Sciences → Engineering → Mechanics of Materials

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Depth-profiling Pore Morphology in Nanoporous Thin Films Using Positronium Lifetime Annihilation Spectroscopy

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