Ultrafast Imaging of Ultraviolet Laser Ablation and Etching of Polymethyl Methacrylate

Bodil Braren; R. Srinivasan; Kelly G. Casey; Mildred Yeh

doi:10.1557/proc-158-471

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JOURNAL ARTICLE

Ultrafast Imaging of Ultraviolet Laser Ablation and Etching of Polymethyl Methacrylate

Bodil Braren R. Srinivasan Kelly G. Casey Mildred Yeh

Year: 1989 Journal: MRS Proceedings Vol: 158 Publisher: Cambridge University Press

DOI: 10.1557/proc-158-471

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Keywords:

Materials science Full width at half maximum Fluence Ablation Ultraviolet Laser Optics Laser ablation Polymethyl methacrylate Etching (microfabrication) Radiation Ultrashort pulse Irradiation Optoelectronics Polymer Composite material Layer (electronics)

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Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Ultrafast Imaging of Ultraviolet Laser Ablation and Etching of Polymethyl Methacrylate

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