Fabrication of Thin-Film Transistors Using PECVD-Grown Carbon Nanotubes and Their Application to Integrated Circuits

Takashi Mizutani; Shigeru Kishimoto

doi:10.1557/opl.2012.766

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JOURNAL ARTICLE

Fabrication of Thin-Film Transistors Using PECVD-Grown Carbon Nanotubes and Their Application to Integrated Circuits

Takashi Mizutani Shigeru Kishimoto

Year: 2012 Journal: MRS Proceedings Vol: 1451 Pages: 159-168 Publisher: Cambridge University Press

DOI: 10.1557/opl.2012.766

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Keywords:

Materials science Carbon nanotube Plasma-enhanced chemical vapor deposition Thin-film transistor Nanotechnology Subthreshold conduction Optoelectronics Chemical vapor deposition Electronic circuit Fabrication Transistor Voltage Electrical engineering Layer (electronics)

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Carbon Nanotubes in Composites

Physical Sciences → Materials Science → Materials Chemistry

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Fabrication of Thin-Film Transistors Using PECVD-Grown Carbon Nanotubes and Their Application to Integrated Circuits

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