We demonstrate the fabrication of planar interdigited micro-supercapacitors by using a high-spatial-resolution direct laser writing setup. The interspace and the width of the electrodes are accurately controlled by the laser patterning at the nanometer scale precision to shorten the mean ionic path. As a result, supercapacitors with performance exceeding the state-of-the-art have been achieved.
Jinguang CaiAkira WatanabeChao Lv
Jinguang CaiChao LvCun HuJunhong LuoShuai LiuJiangfeng SongYan ShiChangan ChenZhi ZhangSayaka OgawaEiji AoyagiAkira Watanabe
J.C. HuangLu LiuDong LiuLin LiHailong ShenJinyu WuXianqing LiangWenzheng ZhouHaifu Huang