JOURNAL ARTICLE

Fabrication of Polycrystalline Si1−xGex Films on Oxide for Thin-Film Transistors

Julie A. TsaiAndrew J. TangR. Reif

Year: 1994 Journal:   MRS Proceedings Vol: 343   Publisher: Cambridge University Press
Keywords:
Materials science Crystallite Crystallization Amorphous solid Recrystallization (geology) Oxide Grain size Annealing (glass) Thin film Crystallography Analytical Chemistry (journal) Chemical engineering Nanotechnology Composite material Metallurgy

Metrics

2
Cited By
0.89
FWCI (Field Weighted Citation Impact)
11
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
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