JOURNAL ARTICLE

Characterization of Ruo2 Films Prepared by Rf Reactive Magnetron Sputtering

Lijian MengM.P. dos Santos

Year: 1998 Journal:   MRS Proceedings Vol: 541   Publisher: Cambridge University Press
Keywords:
Partial pressure Materials science Sputtering Oxygen Sputter deposition Total pressure Scanning electron microscope Analytical Chemistry (journal) Substrate (aquarium) Diffraction Stress (linguistics) Thin film Composite material Optics Nanotechnology Thermodynamics Chemistry

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Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
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