JOURNAL ARTICLE
Characterization of Ruo2 Films Prepared by Rf Reactive Magnetron Sputtering
Year: 1998 Journal: MRS Proceedings Vol: 541 Publisher: Cambridge University Press
Keywords:
Partial pressure Materials science Sputtering Oxygen Sputter deposition Total pressure Scanning electron microscope Analytical Chemistry (journal) Substrate (aquarium) Diffraction Stress (linguistics) Thin film Composite material Optics Nanotechnology Thermodynamics Chemistry
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FWCI (Field Weighted Citation Impact)
14
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0.28
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
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