JOURNAL ARTICLE
Fabrication of Silicon Micro-Needles by Using Plasma Process.
Year: 2003 Journal: The Journal of the Institute of Electrical Engineers of Japan Vol: 123 (10)Pages: 656-659
Keywords:
Fabrication Plasma Silicon Materials science Process (computing) Nanotechnology Optoelectronics Computer science Physics Operating system Nuclear physics
Metrics
2
Cited By
0.63
FWCI (Field Weighted Citation Impact)
1
Refs
0.74
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Electrohydrodynamics and Fluid Dynamics
Physical Sciences → Engineering → Electrical and Electronic Engineering
Plasma Diagnostics and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
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