Capacitive Micromachined Ultrasound Transducer as a Sensor in Microfluidic Environment

Evaldas Sapeliauskas; Gailius Vanagas; Dovydas Barauskas; Darius Viržonis

doi:10.1166/sl.2014.3348

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Capacitive Micromachined Ultrasound Transducer as a Sensor in Microfluidic Environment

Evaldas Sapeliauskas Gailius Vanagas Dovydas Barauskas Darius Viržonis

Year: 2014 Journal: Sensor Letters Vol: 12 (11)Pages: 1597-1599 Publisher: American Scientific Publishers

DOI: 10.1166/sl.2014.3348

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Keywords:

Transducer Capacitive sensing Microfluidics Capacitive micromachined ultrasonic transducers Acoustics Ultrasound Materials science Optoelectronics Computer science Electronic engineering Electrical engineering Nanotechnology Engineering Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Flow Measurement and Analysis

Physical Sciences → Engineering → Mechanics of Materials

Capacitive Micromachined Ultrasound Transducer as a Sensor in Microfluidic Environment

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