JOURNAL ARTICLE

Development of a 3-Layered Dicing Blade Applying: Ultra-Violet Curable Resin

Seungbok LeeYasuhiro TaniToshiyuki EnomotoKiyoshi YANAGIHARAKohei YANAKA

Year: 2004 Journal:   TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C Vol: 70 (694)Pages: 1830-1835   Publisher: Japan Society Mechanical Engineers

Abstract

The use of ultra-violet curable resins as bonding agent can greatly reduce production cost by shortening the curing time from hours to minutes and by reducing air polluting fumes compared with thermosetting resins. Dicing blades with ultra-violet curable resins have been developed to enhance such advantages. A new conceptional blade has been proposed and developed, which is called a three-layered dicing blade. It has the structure composed of an inner layer with coarse abrasives for cutting and an outer layer with fine abrasives for finishing up at the same time. And in order to optimize uneven wear between the inner-and-outer layers of the blades, concentration of diamond abrasives in outer layer was increased and some kinds of fibers were mixed with resin as filler. As a result of the cutting experiments, in comparison with thermosetting resin blade and other single-layered ultra-violet curable resin blades, cutting performances have been improved.

Keywords:
Wafer dicing Thermosetting polymer Materials science Composite material Curing (chemistry) Layer (electronics) Blade (archaeology) Mechanical engineering

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Topics

Engineering Applied Research
Physical Sciences →  Engineering →  Civil and Structural Engineering
Surface Modification and Superhydrophobicity
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Adhesion, Friction, and Surface Interactions
Physical Sciences →  Engineering →  Mechanics of Materials

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