(Invited) Molecular Layer Deposition of Flexible, Transparent and Conductive Hybrid Organic-Inorganic Thin Films

Abstract

Hybrid organic-inorganic thin film alloys were fabricated by molecular layer deposition (MLD) and atomic layer deposition (ALD) methods using diethyl zinc (DEZ), hydroquinone (HQ), and water (H2O). Sequential exposures of DEZ & HQ for zincone MLD and DEZ & H2O for ZnO ALD led to the linear growth of zincone alloy films. The alloy film composition could be varied by changing the number of MLD cycles and ALD cycles per reactant sequence. The alloy films were found to be highly conductive. Zincone alloys grown with MLD:ALD cycle ratios of 1:1 and 2:2 displayed sheet resistivities in the 10-3Ω cm range. These sheet resistivities were substantially lower than the sheet resistivity for ZnO ALD films. These alloys films may be useful as flexible, transparent and conducting coatings.