JOURNAL ARTICLE

A Reduced-Order Model for Electrically Actuated Microplates

Keywords:
Order (exchange) Computer science Materials science Business

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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Adhesion, Friction, and Surface Interactions
Physical Sciences →  Engineering →  Mechanics of Materials
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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