Humidity Sensor Using Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub> and SnO<sub>2</sub> Prepared by Sol-Gel Method
Abstract
Ultra-fine paticles of Al2O3, TiO2 and SnO2 prepared by the sol-gel method for humidity sensing materials with an optimal porous structuture, a superior humidity sensing characteristics have been acquired in a humidity range of 10 to 95% RH and at an operation temperature of -20 to 100°C. The sensing mechanism of this humidity sensor utilizes the variation in proton conductivity in absorbed water. This mechanism has proved to be hard to use at temperatures above 100°C. Heat cleaning by a ceramic heater enables us to improve humidity sensors of high reliability and high precision. They are exellent in withstanding various corrosive environments over a long period.
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