JOURNAL ARTICLE
Spectroscopic Ellipsometry of Ta2O5 ON Si
Curt A. RichterNhan V. NguyenG. B. Alers
Year: 1999 Journal: MRS Proceedings Vol: 567 Publisher: Cambridge University Press
Keywords:
Materials science Ellipsometry Analytical Chemistry (journal) Metrology Annealing (glass) Dielectric Silicon Optics Thin film Optoelectronics Nanotechnology Metallurgy
Metrics
4
Cited By
1.17
FWCI (Field Weighted Citation Impact)
10
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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