JOURNAL ARTICLE

Spectroscopic Ellipsometry of Ta2O5 ON Si

Curt A. RichterNhan V. NguyenG. B. Alers

Year: 1999 Journal:   MRS Proceedings Vol: 567   Publisher: Cambridge University Press
Keywords:
Materials science Ellipsometry Analytical Chemistry (journal) Metrology Annealing (glass) Dielectric Silicon Optics Thin film Optoelectronics Nanotechnology Metallurgy

Metrics

4
Cited By
1.17
FWCI (Field Weighted Citation Impact)
10
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
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