JOURNAL ARTICLE
A thin film vacuum sensor formed on polyimide substrate for thermal conductivity vacuum gauge.
Akira AokiKatsumi TAKIGUCHISoichi OGAWAToshikazu Okada
Year: 1987 Journal: Shinku Vol: 30 (5)Pages: 233-236 Publisher: The Vacuum Society of Japan
Keywords:
Polyimide Materials science Substrate (aquarium) Thermal conductivity Gauge (firearms) Thin film Optoelectronics Conductivity Composite material Nanotechnology Metallurgy Chemistry Layer (electronics)
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor Technologies Research
Physical Sciences → Engineering → Biomedical Engineering
Sensor Technology and Measurement Systems
Physical Sciences → Computer Science → Computer Networks and Communications
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