Rapid Fabrication of High-Aspect-Ratio Platinum Microprobes by Electrochemical Discharge Etching

Abstract

Using a graphite crucible as the counter-electrode, platinum microprobes with an aspect ratio of 30 and a tip apex radius less than 100 nm were fabricated by an electrochemical discharge etching process. The “neck-in” structure on the platinum wire induced by the electrical discharge at the liquid-air interface plays a key role in the probe shape and the voltage of the following pure electrochemical etching determines the final probe aspect ratio and tip dimensions. Moreover, the shape and diameter of the graphite counter-electrode also exhibit a significant effect on the realization of high-aspect-ratio probes. The method presented here provides a simple and rapid approach to the fabrication of micro-tools for micromachining, micromanipulation, as well as biomedical applications.