A Photonic Crystal ring resonator based force sensor is proposed. The device consists of Photonic crystal slab integrated on top of a 220nm thick silicon cantilever and is capable of sensing forces as small as 10nN. The sensitivity is derived as 8.33nN for a wavelength resolution of 0.1nm with a high quality factor of 16000.
Indira BahaddurP.C.Srikanth ponnathapurPreeta Sharan
Hüseyin AdemgilU. F. EzeEmmanuel Kofi AkowuahShyqyri Haxha
Ezel Yağmur ZeydanSercan KeskindenAtilla Aydınlı
Piyush ShrivastavaSushma PuniaShweta MittalAnkur SahariaTanvi SharmaAmogh DyavangoudarManish Tiwari
Preeti RaniYogita KalraVenus DilluRavindra Kumar Sinha