Comparative Analysis on Design and Simulation of Perforated Mems Capacitive Pressure Sensor

Kirankumar B. Balavalad; Bhagyashree Mudhol; B. G. Sheeparmatti; PraveenKumar B. Balavalad

doi:10.17577/ijertv4is070322

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Comparative Analysis on Design and Simulation of Perforated Mems Capacitive Pressure Sensor

Kirankumar B. Balavalad Bhagyashree Mudhol B. G. Sheeparmatti PraveenKumar B. Balavalad

Year: 2015 Journal: International Journal of Engineering Research and Vol: V4 (07) Publisher: International Research Publication House

DOI: 10.17577/ijertv4is070322

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Keywords:

Microelectromechanical systems Capacitive sensing Materials science Computer science Electrical engineering Engineering Optoelectronics

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Advanced Sensor and Control Systems

Physical Sciences → Engineering → Control and Systems Engineering

Comparative Analysis on Design and Simulation of Perforated Mems Capacitive Pressure Sensor

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