Characterization of ZnO–In2O3 transparent conducting films by pulsed laser deposition

Michio Mikawa; Toshihiro Moriga; Yuji Sakakibara; Yukinori Misaki; Kei‐ichiro Murai; Ichiro Nakabayashi; Kikuo Tominaga

doi:10.1016/j.materresbull.2005.02.019

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Characterization of ZnO–In2O3 transparent conducting films by pulsed laser deposition

Michio Mikawa Toshihiro Moriga Yuji Sakakibara Yukinori Misaki Kei‐ichiro Murai Ichiro Nakabayashi Kikuo Tominaga

Year: 2005 Journal: Materials Research Bulletin Vol: 40 (6)Pages: 1052-1058 Publisher: Elsevier BV

DOI: 10.1016/j.materresbull.2005.02.019

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Keywords:

Materials science Amorphous solid Pulsed laser deposition Electrical resistivity and conductivity Substrate (aquarium) Indium Thin film Deposition (geology) Analytical Chemistry (journal) Transparent conducting film Oxide Carbon film Chemical engineering Optoelectronics Nanotechnology Metallurgy Crystallography Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Characterization of ZnO–In2O3 transparent conducting films by pulsed laser deposition

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