High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

T. Shimizu; M. Murahara

doi:10.1557/proc-451-521

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High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

T. Shimizu M. Murahara

Year: 1996 Journal: MRS Proceedings Vol: 451 Publisher: Cambridge University Press

DOI: 10.1557/proc-451-521

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Keywords:

Fluence Materials science Fluorocarbon Excimer laser Laser Resolution (logic) Irradiation Layer (electronics) High resolution Displacement (psychology) Laser beams Beam (structure) Composite material Optics

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Tribology and Wear Analysis

Physical Sciences → Engineering → Mechanics of Materials

Adhesion, Friction, and Surface Interactions

Physical Sciences → Engineering → Mechanics of Materials

Silicone and Siloxane Chemistry

Physical Sciences → Materials Science → Materials Chemistry

High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

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