Electrical Characterization of Al2O3 - SiO2 Mos Structures

L.-Å. Ragnarsson; Erik Aderstedt; Per Lundgren

doi:10.1557/proc-567-451

ScienceGate Book Chapters

JOURNAL ARTICLE

Electrical Characterization of Al₂O₃ - SiO₂ Mos Structures

L.-Å. Ragnarsson Erik Aderstedt Per Lundgren

Year: 1999 Journal: MRS Proceedings Vol: 567 Publisher: Cambridge University Press

DOI: 10.1557/proc-567-451

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Annealing (glass) Capacitance Dielectric Characterization (materials science) Optoelectronics Composite material Nanotechnology Electrode Physical chemistry

Metrics

Cited By

2.34

FWCI (Field Weighted Citation Impact)

Refs

0.90

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Electrical Characterization of Al₂O₃ - SiO₂ Mos Structures

Metrics

Topics

Related Documents

The System Al ₂ O ₃ ‐Cr ₂ O ₃ ‐Sio ₂

Characterization of Sandwiched MIM Capacitors Under DC and AC Stresses: Al₂O₃-HfO₂-Al₂O₃Versus SiO₂-HfO₂-SiO₂

Thermochemical Analysis and Modeling of the Al ₂ O ₃ –Cr ₂ O ₃ , Cr ₂ O ₃ –SiO ₂ , and Al ₂ O ₃ –Cr ₂ O ₃ –SiO ₂ Systems Relevant to Refractories

Interfacial and electrical characterization of HfO₂/Al₂O₃/InAlAs structures

THE SYSTEM: Al ₂ O ₃ .SiO ₂

Electrical Characterization of Al2O3 - SiO2 Mos Structures

Metrics

Topics

Related Documents

The System Al 2 O 3 ‐Cr 2 O 3 ‐Sio 2

Characterization of Sandwiched MIM Capacitors Under DC and AC Stresses: Al2O3-HfO2-Al2O3Versus SiO2-HfO2-SiO2

Thermochemical Analysis and Modeling of the Al 2 O 3 –Cr 2 O 3 , Cr 2 O 3 –SiO 2 , and Al 2 O 3 –Cr 2 O 3 –SiO 2 Systems Relevant to Refractories

Interfacial and electrical characterization of HfO2/Al2O3/InAlAs structures

THE SYSTEM: Al 2 O 3 .SiO 2

Electrical Characterization of Al₂O₃ - SiO₂ Mos Structures

The System Al ₂ O ₃ ‐Cr ₂ O ₃ ‐Sio ₂

Characterization of Sandwiched MIM Capacitors Under DC and AC Stresses: Al₂O₃-HfO₂-Al₂O₃Versus SiO₂-HfO₂-SiO₂

Thermochemical Analysis and Modeling of the Al ₂ O ₃ –Cr ₂ O ₃ , Cr ₂ O ₃ –SiO ₂ , and Al ₂ O ₃ –Cr ₂ O ₃ –SiO ₂ Systems Relevant to Refractories

Interfacial and electrical characterization of HfO₂/Al₂O₃/InAlAs structures

THE SYSTEM: Al ₂ O ₃ .SiO ₂