CMOS and NEMS Hybrid Architectures

T. Ernst; Issam Ouerghi; Willy Ludurczak; Julien Arcamone; Laurent Duraffourg; E. Ollier; J. Philippe; Sébastien Hentz

doi:10.1149/06910.0253ecst

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JOURNAL ARTICLE

CMOS and NEMS Hybrid Architectures

T. Ernst Issam Ouerghi Willy Ludurczak Julien Arcamone Laurent Duraffourg E. Ollier J. Philippe Sébastien Hentz

Year: 2015 Journal: ECS Transactions Vol: 69 (10)Pages: 253-258 Publisher: Institute of Physics

DOI: 10.1149/06910.0253ecst

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Abstract

This paper reviews various realizations in the field of monolithic integration of Nano-Electro-Mechanical-Systems (NEMS) with CMOS. Such integrated solutions are of great interest in emerging domains as chemical analysis and life science. Co-integration enables to address a large number of sensors or to achieve enhaned sensitivity thanks to a high signal to noise ratio.

Keywords:

Nanoelectromechanical systems CMOS Sensitivity (control systems) Electronic engineering Noise (video) Computer science Nanotechnology Electrical engineering Engineering Materials science Artificial intelligence

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Topics

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

CMOS and NEMS Hybrid Architectures

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