JOURNAL ARTICLE

Effect of post-deposition annealing on the structural, optical and electrical properties of IGZO films

Jae-Hyun JeonTae-Kyung GongYoung‐Min KongHak Min LeeDaeil Kim

Year: 2015 Journal:   Electronic Materials Letters Vol: 11 (3)Pages: 481-484   Publisher: Springer Science+Business Media
Keywords:
Materials science Annealing (glass) Electrical resistivity and conductivity Amorphous solid Transmittance Sputter deposition Thin film Figure of merit Optoelectronics Sputtering Composite material Nanotechnology Crystallography Electrical engineering

Metrics

26
Cited By
1.50
FWCI (Field Weighted Citation Impact)
10
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Electrical and Thermal Properties of Materials
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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